Předmět Vacuum technologies (FCH-MAT_VTE)

Na serveru studentino.cz naleznete nejrůznější studijní materiály: zápisky z přednášek nebo cvičení, vzorové testy, seminární práce, domácí úkoly a další z předmětu FCH-MAT_VTE - Vacuum technologies, Fakulta chemická, Vysoké učení technické v Brně (VUT).

Materiál	Typ	Datum	Počet stažení

Cíl

1. Users knowledge of vacuum devices and technologies2. Overview of vacuum application in solid surface investigation and particle beam techniques3. Overview of vacuum application in fabrication for solid surface treatment, thin film coating including plasma technics and inert atmosphere assurance

Osnova

Vacuum technology Subject content The subject is divided into 5 chapters and 13 two-hour lectures:A. Physical fundamentals of vacuum technology1. Fundamental laws of gas state 2. Gas, vapour, ideal gas, basic laws, state equation3. Kinetic theory of gases4. Velocity distribution of molecules, kinetics explanation of pressure, mean free path of molecules and its meaning5. Transport phenomena6. Diffusion, thermal conductivity of gases, gas viscosity7. Gas convection8. Basic terms, kinds of convection, formulas for conductivity calculation9. Processes performing on the walls of vacuum systems10. Interaction of molecules with system walls, sorption and desorption, vapour pressure, evaporation 11. Processes performing inside of the walls of vacuum systems12. Capillary condensation, convection and swallowing of gases by porous maters, penetration of gases through compact matersB. Vacuum acquiring 1. Theory of pumping process2. Pumping process in time, effect of piping and leak3. Pumps classification and parameters4. Pumps classification according to principle, pump parameters5. Transport pumps with periodically change of volume6. Rotary pumps, membrane pumps and piston pumps.7. Transport pumps working on principle of momentum transfer8. Roots pumps, diffusion pumps and their accessories, molecular and turbomolecular pumps9. Pumps based on gas bonding10. Pumps cryogenic and cryosorption, ion pumps, getter pumpsC. Measurement in vacuum technology1. Introduction2. Quantities and units, vacuum ranges, classification and vacuometer parameters3. Total pressure measurements4. Liquid and compression vacuometers, thermal vacuometers, membrane vacuometers, viscous vacuometers, ionisation vacuometers5. Partial pressure measurements6. Principles of mass spectrometers, mass spectrometers measurements7. Gas flow measurements, pumping rate measurement8. Vacuometers calibration9. Vacuum facilities leak detection10. Overview of vacuum leak detection, principles and operating of helium leak detectorD. Materials for vacuum technology1. Requirements for vacuum utilize materials2. Overview of materials and their application for vacuum technologyE. Vacuum apparatus1. Construction parts of vacuum apparatus2. Vacuum chambers, piping, fixed connection, mounted connection, valves and feedthroughs3. Vacuum apparatus for rough and fine vacuum4. Pumps cooperation, typical applications, pumping of aggressive and condensing gases5. Vacuum apparatuses for high vacuum6. Conception of high vacuum apparatuses, their operation and typical application7. Ultrahigh vacuum apparatuses8. Conception of UHV apparatuses, their operation and typical application9, Cleaning technique, vacuum hygiene F. Excursion into faculty laboratories with vacuum facilities and their function demonstration

Literatura

Vacuum Technology, www.pfeiffer-vacuum.net (EN)

Požadavky

Knowledge of fundamentals of physics – level of the basic course of physics in technical universities, mainly parts of Mechanics and Kinetic theory of gases and Thermodynamics.

Garant

doc. Ing. Ota Salyk, CSc.

Vyučující

doc. Ing. Ota Salyk, CSc.